| General |
|
•
|
SPM
sensor for high resolution imaging |
| • |
fits
to all well-known commercial SPMs |
| • |
cantilever
and tip are supported by a single crystal silicon holder (monolithic
design) |
| Material
Features |
|
•
|
highly
doped,single crystal silicon (resistivity 0.01 -0.025 Ohm*cm) |
| • |
no
intrinsic stress and absolutely straight cantilevers |
| Cantilever |
|
•
|
rectangular
cantilever with triangular free end |
| • |
easy
positioning of tip on the area of interest due to the "ARROW"shape
and consistent distance between tip and cantilever end |
| • |
trapezoidal
cross section with wide detector side for easy laser adjustment |
| Holder |
|
•
|
dimensions
of the holder are very reproducible (1.6 mm x 3.4 mm) |
| • |
replacement
of sensor without major readjustment of the detector system |
| Tip |
|
•
|
tip
height 10 -15 µm and radius of curvature typically <10nm
(15nm guaranteed) |
| • |
macroscopic
half cone angles 20 ° to 25 ° from the front and 30 °to
35 ° when viewed along the cantilever axis. |
|
|
|
